Development of an electromagnetic micropump with photosensitive magnetic nanocomposite

Abstract

　A micropump is one of the most important microfluidic components in Micro Total Analysis System (μ-TAS) and Lab-on-a-chip. Conventional fabrication processes for micropumps are complex and laborious. Micro/nano-systems have been required to satisfy the integration, further miniaturization, and shortening fabrication process time for more complex application. In this paper, we propose a simple-structural micropump having a magnetically-driven diaphragm made of a photosensitive nanocomposite for an easy integration method. The fabricated micropump generated the one-directional fluid flow at the flow rate of 36.1nl/min evaluated by using image analysis with fluorescent microscope images.