Journal of the Japan Society of Applied Electromagnetics and Mechanics
Online ISSN : 2187-9257
Print ISSN : 0919-4452
ISSN-L : 0919-4452
Special Issue on The 23rd MAGDA Conference in Takamatsu (MAGDA2014)
Development of magnetically driven micro valve using SU-8/Fe composite
Junya SUZUKIKyohei TERAOHidekuni TAKAOFusao SHIMOKAWAFumikazu OOHIRATakaaki SUZUKI
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2015 Volume 23 Issue 2 Pages 407-413

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Abstract

 In this study, we propose a magnetically driven micro valve made of magnetic composite with thick negative photoresist SU-8 and magnetic particles. It is able to fabricate a magnetically driven element using simple processing method based on micromachining technology by magnetic composite. To evaluate performance of the proposed microvalve, driving test under the external magnetic field was carried out. A prototype of the microvalve has the flow rate reduction rate of about 60%, and pressure resistance of 9 kPa.

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© 2015 The Japan Society of Applied Electromagnetics and Mechanics
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