Journal of the Japan Society of Applied Electromagnetics and Mechanics
Online ISSN : 2187-9257
Print ISSN : 0919-4452
ISSN-L : 0919-4452
Special Topic : Application of Specific Environment
Magnetic Fluid Having Heat Resistance for Magnetic Fluid Vacuum Seal
Yasushi YAMAMOTO
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Keywords: magnetic fluid, ferro fluid, vacuum seal, heat resistance, semiconductor-manufacturing processes
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2018 Volume 26 Issue 4 Pages 511-515

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[in Japanese]
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© 2018 The Japan Society of Applied Electromagnetics and Mechanics
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