Proposal of Small Size Angle Sensor with Vernier Pattern

Abstract

　This paper proposes small size angle sensor with Vernier pattern. Angle sensors play an important role in improving the functionality and workability of machine tools, industrial robots and mounting equipment. In that situation, angle sensors are required to be smaller, have higher accuracy and have functional safety. In response to these requirements, the aim is to develop a magnetic angle sensor with a 30 mm diameter, 19 bit resolution and redundant system by using a new mechanism. A rotor with a copper foil pattern and a stator with a meander coil pattern are prototyped and evaluated for angle error. As a result, 19 bit resolution and ± 1° angle error was obtained. This showed the possibility of further miniaturization and higher accuracy of the sensor by using the Vernier pattern.