2024 Volume 32 Issue 2 Pages 473-479
We have developed inchworm-type miniature robots using piezoelectric elements and electromagnets. The miniature robots are operated by synchronizing the micro-deformation of piezoelectric elements and the adsorption of electromagnets. The miniature robots are capable of both precise and wide-range motion. In this paper, we experimentally describe the control waveforms of the piezoelectric elements and electromagnets. It is clarified the followings. (i) Reduction of backward motion caused as a result of electromagnets by providing overlap time of more than 1/12 cycle to the electromagnets. (ii) By extending the piezo with a rise time of less than 0.2 ms and contracting it with a fall time of 0.6 ms - 6 ms, the backward motion of the miniature robot is reduced, and the displacement in one control cycle is improved. In addition, the displacement in one control cycle is improved by 1.23 times compared to the conventional control method.