Sensing of multiple gas molecules by integrated gas sensor consisting of ionic gel and multiple electrodes

Abstract

This study aims to develop integrated gas sensors for multiple gas sensing. A structure consisting of an ionic gel and multiple electrodes was proposed to realize the integration of gas sensors. Using two of the multiple electrodes, voltage modulation by gas molecules at the ionic gal/electrode interface was detected through the drain current measurement of an externally connected transistor. The voltage modulation depends on the electrode materials and gas molecules. From several types of time-series drain currents derived from combinations of two electrodes among the multiple electrodes, the concentrations of hydrogen, ammonia, and ethanol were simultaneously estimated using a neural network model.