Study of plasma–material interactions using impedance spectroscopy

Abstract

This article introduces experimental studies on plasma–material interactions using an impedance spectroscopy method. Impedance spectroscopy, which has been primarily developed in the field of electrochemistry as a method for monitoring the electrical properties of devices under test, is applied to the analysis of a material surface modified using plasma exposure. Utilizing the electrical conductivity of plasmas, the “in-situ” impedance spectroscopy of material properties is possible and is expected to be a tool for monitoring thin-film deposition and etching processes using plasmas.