Abstract
This paper describes mover materials successfully developed in 2005. They are compressive Sm-Fe alloy
film and its composite multimorph mover devices. The composition dependence of magnetostriction was
studied. The giant magnetostriction (GM) was found from 28 to 34 at%Sm. Furthermore, the largest
compressive value of magnetostriction was 1400 ppm in a SmFe2.2 film prepared at 423 K of substrate
temperature under 0.5 Pa of argon gas sputtering pressure. The high magnetostrictive susceptibility was
also obtained in the bimorph composite GM device constructed with extensive (positive) Tb-Fe and
compressive (negative) Sm-Fe alloys fllms.
