Changes in surface condition and time to clear vision on ITO thin film by electron beam irradiation

Abstract

ITO thin films are useful materials for electric devices, where wettability of the ITO thin film is one of dominant factors of adherent and durability. Because electron beam irradiation decreases the contact angle of materials, we studied influence of electoron beam irradiation on surface condition of ITO thin film. From the results of contact angle measurement, x-ray photoelectron spectra and force-distance curve before and after electron beam irradiation on thin ITO films, we found that the surface energy was increased by the irradiation.