Abstract
Recently, laser ablation has been widely used to prepare the films of multicomponent-oxides such as high Tc superconductors, ferroelectric materials, etc. Concerning the superconducting films, the laser ablation is recognized as one of the best deposition techniques. The deposition by laser ablation consists of three processes; a removal of target materials by forcusing the pulsed laser beam, a transport of the ejected atoms and clusters, and a solidification of them onto the substrate. The most significant advantage of this technique is stoichiometric deposition; there is no deviation in the composition between the target and the film. This advantage promotes the research in materials science, saving cost and time for sythesis of advanced thin films. Furthermore, it is possible to utilize excited species of the ejected materials for low temperature deposition. In this paper, the feature of the present technique will be reviewed.
