Preparation of thin films of (Tb, Dy)Fe2 giant magnetostrictive alloy by ion beam sputtering process

Mitsuhiro WADA; Yoshihito MATSUMURA; Hirohisa UCHIDA; Haru-Hisa UCHIDA; Hideo KANEKO

doi:10.2978/jsas.8.27

Preparation of thin films of (Tb, Dy)Fe₂ giant magnetostrictive alloy by ion beam sputtering process

Mitsuhiro WADA, Yoshihito MATSUMURA, Hirohisa UCHIDA, Haru-Hisa UCHIDA, Hideo KANEKO

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Keywords: Giant-Magnetostriction, Terfenol-D, Thin Film, Rare Earth, Iron, Sputtering, Ion Beam Sputtering

JOURNAL FREE ACCESS

1996 Volume 8 Issue 1-2 Pages 27-28

DOI https://doi.org/10.2978/jsas.8.27

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Abstract

Giant magnetostrictive (Tb, Dy)Fe₂ films were prepared using an ion beam sputtering (IBS) process. In spite of an amorphous like structure of the films analysed, significantly larger values of magnatization and magnetostriction were obtained in contrast with that of amorphous like films by flash evaporation process. The effect was yielded by Ar in the films included during the IBS deposition process.

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