Journal of the Japan Society for Abrasive Technology
Online ISSN : 1880-7534
Print ISSN : 0914-2703
ISSN-L : 0914-2703
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Development of a grinding stone for finishing with hybrid bonding agents
Yasuhiro TANI, Hyunchae GO, Yasuyuki KAMIMURA
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Keywords: grinding stone, finishing, bonding agent, agglomerated grains, silicon wafer
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2005 Volume 49 Issue 8 Pages 445-449

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[in Japanese]
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© 2005 by The Japan Society for Abrasive Technology
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