Journal of the Japan Society for Abrasive Technology
Online ISSN : 1880-7534
Print ISSN : 0914-2703
ISSN-L : 0914-2703
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Polishing characteristic of silicon wafer by mica slurry
Hitoshi NAKAMURA, Shojiro OKADA
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Keywords: mica slurry, silicon wafer, nano-meter, surface roughness, loose abrasive polishing method, pH
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2005 Volume 49 Issue 9 Pages 511-515

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[in Japanese]
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© 2005 by The Japan Society for Abrasive Technology
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