Journal of the Japan Society for Abrasive Technology
Online ISSN : 1880-7534
Print ISSN : 0914-2703
ISSN-L : 0914-2703
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A study on the effect of oxidants in chemical mechanical polishing of germanium mono-crystalline wafers
Isamu KOSHIYAMA, Tetsushi SENDA, Haruo MASAI, Sachiko HOSHIYA
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Keywords: germanium, mono-crystalline wafers, chemical-mechanical polishing, oxidants, abrasives
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2006 Volume 50 Issue 2 Pages 102-106

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[in Japanese]
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© 2006 by The Japan Society for Abrasive Technology
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