Journal of the Japan Society for Abrasive Technology
Online ISSN : 1880-7534
Print ISSN : 0914-2703
ISSN-L : 0914-2703
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Development and evaluation of CMG wheels made by electrophoretic deposition
Libo ZHOU†, Isao TOITA,†, Jun SHIMIZU†, Hiroshi EDA†
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Keywords: chemo-mechanical grinding, electrophoretic deposition, Si single crystal wafer, subsurface damage, fixed abrasive
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2006 Volume 50 Issue 3 Pages 130-133

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[in Japanese]

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© 2006 by The Japan Society for Abrasive Technology
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