Probing system with force control and contact point control method for electric testing of a semiconductor device involving area around microscope field
Tomohiko ISHIKAWA, Hiroshi EDA, Libo ZHOU, Jun SHIMIZU, Hirotaka OJIMA, Yoshio YAMAMOTO, Tatuo KAWAKAMI
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Keywords:
probing system,
force feedback,
contact position control,
micro-manipulator,
PZT actuator,
scanning electron microscope(SEM)
2006 Volume 50 Issue 6 Pages 318-323
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