Achievement of precise workpiece edge shape with polishing method utilizing polymer particles

Journal of the Japan Society for Abrasive Technology

Online ISSN : 1880-7534
Print ISSN : 0914-2703
ISSN-L : 0914-2703

Achievement of precise workpiece edge shape with polishing method utilizing polymer particles

Toshiyuki ENOMOTO ^†, Sanaki HORIMOTO ^†, Kenji KAWATA ^†, Yasuhiro TANI ^†, Yishen LU ^†

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Keywords: polishing, mirror surface finishing, polymer particle, silicon wafer, edge roll off

JOURNAL FREE ACCESS

2006 Volume 50 Issue 9 Pages 543-547

DOI https://doi.org/10.11420/jsat.50.543

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[in Japanese]

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© 2006 by The Japan Society for Abrasive Technology

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