Abstract
When producing grooves in quartz glass using an ultrafine-grit resin-bonded diamond blade, it is possible to simultaneously increase both the densification and the height alignment of the cutting edges using the grain burial phenomenon and the grain attritious wear phenomenon. After producing grooves with this diamond blade, the workpieces were polished at an angle and the average depth of the cracks in their groove floors was investigated. Grinding with five times the average depth as the finishing margin produced a bottom surface roughness of 23 nm (Ra). At a feed rate as low as 2 mm/min, fine square grooves with a bottom surface roughness of 21 nm (Ra) and a side surface roughness of 7 nm (Ra) could be obtained without finish machining.
