Abstract
A high-precision milling process of natural diamond was developed using Focused Ion Beam (FIB) technology. The FIB diameter determines the limitation of the 3-dimensional milling process edge sharpness. This report presents a comparison between the beam diameter obtained by actual measurement using the frame scan edge shape and the theoretical calculation values. In addition, an AFM cantilever with diamond probe (DCL) was developed by transplanting diamond to the cantilever after pre-processing the small diamond selected from abrasive powder. This DLC enables repair of chrome residue of advanced photomasks with excellent performance applicable for practical use. This new method can produce a probe shape such as a 20°tip, overhang tip, etc., which are difficult to make by mechanical polishing. In addition, as it is lightweight, the DLC has a high resonance frequency (fc).
