Proposal of a rotation & revolution type polishing (RRP) method and fundamental study on the precision profile polishing

Abstract

In this study, a rotation & revolution type polishing (RRP) method is proposed. The shape of the polishing tool can be stably maintained in this method, and the surface roughness can be uniformly polished by the polishing velocity distribution in the polishing area. Here, the principles of the RRP method are discussed, along with the results of simulation of the polishing tool shape. We also checked the polishing characteristics by a simple experimental, and after this experimental we developed a new RRP unit. We confirmed the fundamental polishing characteristics with this new type RRP unit.