Effect of CH4 flow rate on tribological properties of carbon nitride synthesized using plasma CVD
2013 Volume 57 Issue 1 Pages 39-42
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2013 Volume 57 Issue 1 Pages 39-42
An investigation was carried out to determine the effects of CH4 flow rate on tribological properties of carbon nitride synthesized using plasma CVD. Comparison of AES spectra indicated that nitrogen content of the deposit increased with increasing CH4 flow rate. From the results of tribological properties estimation, the deposits with high nitrogen content showed high wear resistance and low wear of counterpart material when SUJ2 was used as the counterpart material.
