2019 Volume 63 Issue 10 Pages 522-527
With the demand for hard disk drives (HDDs) increasing as long-term storage devices, cost reduction and mass production of glass substrates used for HDDs are required. Currently, fixed abrasive polishing, which uses diamond sheet and coolant, is applied for primary polishing in the production of glass substrates. However, the effects of various coolants on the polishing characteristics have not been clarified. On the other hand, although the effects of the main components of the coolant are mostly unknown, it can be considered that some physical phenomena depending on the removal rate are occurred. This study was performed to determine guidelines required for highly efficient polishing of glass substrates with diamond sheet from the viewpoint of physical properties of coolant and its behavior during polishing. This study focused on the coefficient of friction during polishing, the kinematic viscosity of the coolant, and the physical phenomena of iris pattern as factors affecting the removal rate. Furthermore, multiple regression analysis was performed to identify the performance of coolant and the factors affecting the removal rate. The results confirmed that the kinematic viscosity of the coolant, the friction coefficient, and the iris pattern play important roles in the glass polishing process using diamond sheet.
