Effects of dressing conditions on superfinishing performance of single crystal silicon with mechanochemical superabrasive stone

Abstract

This study focused on the abrasive grain locus of the dresser during dressing and investigated the changes in the stone working area ratio and superfinishing performance. The results indicated that when the interference angle of the dresser’s locus to the stone’s outer diameter is low, the amount of wear during dressing is small and the working area ratio increases. A mechanochemical superabrasive stone with higher working area ratio produces better surface roughness. However, the results also indicated that the working area ratio decreases gradually when the same dressing conditions are repeated, and the finished surface deteriorates.