2025 Volume 69 Issue 2 Pages 92-97
Polyurethane @silica core-shell particles have low density and a smooth spherical shape. For precision machining of metal surfaces used in optical mirrors, we applied core-shell particles as abrasives with rotary tool machining and abrasive slurry jet machining. In this study, Ni surfaces were machined to a depth of approximately 60 nm to evaluate the relations between slurry conditions and workpiece roughness. The results showed that while the effect of abrasive size on roughness varied depending on the machining method, surface roughness decreased with increasing slurry concentration in both methods. After adjusting the slurry conditions, the surface roughness was sub-nanometer level for both methods in the range of approximately 0.25 μm2 to 26000 μm2