Abstract
We develop vibration measuring equipment using high accurate inclimeter sensor that was not used in the past studies related to MEMS sensor. Since high accurate inclimeter sensor has higher resolution and lower self-noises than general MEMS sensors, it is able to measure slighter vibration than the MEMS sensors. In order to examine performance of the equipment developed in this study, vibration characteristics of wooden house is investigated by measurement by using the equipment and servo type accelerometer. Natural frequencies of Fourier spectra of acceleration waves measured by this equipment are mostly corresponded to that measured by the servo type accelerometer. Moreover, natural frequencies of transfer function evaluated by servo type accelerometer are close to those of Fourier spectra.
