Computational Studies on Magnetific Fields in the Magnetron Sputtering System with a Ferromagnetic Target

Abstract

Configuration and control of magnetic fields in a magnetron sputtering system are studied by the Finite Element Method (FEM) caluculations. The configuration of magnetic fields is found to be essential to confine electrons. The modification of magnetic field configuration is studied to enhance the generation of plasmas. The problems of plasma generation and erosion are studied by tracing an electron in a magnetron sputtering system with a ferromagnetic target.