Evaluation of Thermophysical Properties of Out-of-Plane Direction of Thin Films by a Perodic Heating Method

Abstract

We developed a thermophysical property evaluation instrument of the thin film in out-of-plane direction by the 2ω method. The 2ω method is based on periodic heating and thermoreflectance methods. The measurement result by the 2ω method agrees well with the calculation result on the basis of one-dimensional heat conduction model. The analysis method of the measurement result and the evaluated thermophysical property of the thin film depend on the heating frequency. The 2ω method is expected as the thermal conductivity evaluation of the thermoelectric material film.