Abstract
Thermal analyses of various films are reviewed. Drastic increase is observed for the number of reports on thermal analyses of films in recent years. Examples of DTA, DSC and TG of thin and thick films deposited on the substrates are reported. Thermomagnetometry, high-temperature resistivity measurement, dynamic reflectance spectroscopy, thermal desorption spectrum, thermal expansion measurement for the films on substrates are briefly introduced. Examples of DTA, DSC and TG of the substrate-free films and the raw materials for film deposition are reported. Importance of technological developments is stressed for thermal analyses of thin films.
