Abstract
This study describes the fabrication of humidity sensor of anodized aluminum oxide film for the evolved gas analysis method. Water vapor is rapidly adsorbed on and desorbed from aluminum oxide layer formed by electrolytic anodization. The sensor used in this study detected the relative humidity change quickly. In the low humidity region (0 to 20%RH), it was found that the output of sensor increased linearly with increase in the amount of humidity in atmosphere. This sensor can be applied for analyses and measurments of the decomposition reactions involving water vapor evolution, and also of the reduction reactions of several oxides with hydrogen.
