Development of an Active Vibration-Canceling System Using Inertial Force Generators

Abstract

The density of components on precision devices such as semiconductor processors has been increasing recently. As a consequence, the acceptable vibration level of floors on which manufacturing equipment is installed is decreasing. Conversely, vibrations generated by the manufacturing equipment are increasing because manufactured objects are increasing in size. For these situations, active vibration isolation devices are usually used to isolate equipment from floor vibrations. However, the vibration control forces generated by active vibration isolation devices cause floor vibrations when these devices are used to isolate the large vibrations generated by manufacturing equipment. To solve this problem, a new vibration-canceling system using inertial-force generators is developed in this research. In addition, the effectiveness of the developed vibration-canceling system is confirmed via experiments.