Abstract
Several processes in chemical, pharmaceutical, biotechnology and semiconductor industry require contactless levitation and rotation through a hermetically closed process chamber. A highly interesting topology for these applications is the “bearingless slice motor” concept, where already some research has been done in the past, especially focusing on topology and implementation issues. However, only little work has been done to evaluate the ideal number of motor phases. In this paper, a performance evaluation between 2-phase and 3-phase bearingless slice motor concepts is undertaken. It is shown, that 3-phase systems can supply almost the same power as state-of-the-art 2-phase systems and achieve nearly the same acceleration behavior, although they have significantly less power electronics effort.
