Abstract
A new control system for electrostatic actuators was applied to electrostatic suspension. This control system was designed to use a variable capacitor connected with an electrostatic actuator in series. A high voltage was applied to this connection. The voltage applied to the actuator was controlled by varying the capacitance of the variable capacitor. An experimental apparatus was fabricated in order to study the controllability of electrostatic force using this control system. The experimental results show that electrostatic force can be controlled both statically and dynamically. Another experimental apparatus was fabricated for demonstrating the feasibility of electrostatic suspension. This apparatus was able to control the 3-DOF vertical motions of the suspended object. Non-contact suspension was achieved with the developed control system using variable capacitors.
