Abstract
Pneumatic type anti-vibration apparatuses are used in the field of semiconductor manufacturing and precision measurement. The variation of the supplied air pressure from the air compressor causes the position fluctuation of the isolated table. A control method using a voice coil motor (VCM) as the actuator is proposed in this study to control the position fluctuation of the isolated table caused by the supplied air pressure. The feedforward compensator control scheme is used to provide a proper controlled signal to the VCM. According to the controlled signal, VCM exerts driving force in the opposite direction of the air spring expansion or compression to suppress the vibration of the isolated table.
