2004 JSEE Annual Conference (52)
Session ID : 149
Conference information
Host: Japanese Society for Engineering Education, Hokuriku Shin-Etsu Society for Engineering Education
Name : Annual Conference of Japanese Society for Engineering Education
Number : 2004
Location : [in Japanese]
Date : July 30, 2004 - August 01, 2004
(149)"Monodukuri" Project Lab Course Practicing Preparation, Evaluation, and Planning
: Preparation and evaluation of semiconductor thin films by sputtering
Details
Article 1st page
