Abstract
IEEE Micro Electro Mechanical Systems Wopkshop (MEMS-89) was held in Utah University Park Hotel on February 20-22, 1989. The workshop was founded by NSF in 1987 and sponsored by the IEEE Robotics and Automation Council. This is a report of the workshop, which contains the progress of its foundation and the content. This workshop contained fluitful informations for the next era of micro- and nano-engineering.
