JSME International Journal Series A Solid Mechanics and Material Engineering
Online ISSN : 1347-5363
Print ISSN : 1344-7912
ISSN-L : 1344-7912
Deformation
Consideration of Deformation of TiN Thin Films with Preferred Orientation Prepared by Ion-Beam-Assisted Deposition
Toshiyuki HAYASHIAkihito MATSUMUROTomohiko WATANABEToshihiko MORIYutaka TAKAHASHIKatsumi YAMAGUCHI
Author information
JOURNALS FREE ACCESS

2001 Volume 44 Issue 1 Pages 94-99

Details
Abstract

Plastic deformation of TiN thin films with (111) and (200) preferred orientation was determined based on their hardness anisotropy. Hardness was measured by means of the nano-indentation technique. Plastic deformation of TiN films was caused by the indentation of the trigonal diamond tip, and evidence of this phenomenon was provided by cross-sectional scanning electron microscopy (SEM) observation and transmission electron diffraction (TED) analysis. The influence of the differences in residual stress and grain size on hardness anisotropy was restrictive, and hardness anisotropy can be explained by the anisotropy of yield stress as calculated using Schmid’s law. This relationship suggests the existence of a {100}‹110› slip system in the TiN crystal. Transmission electron microscopy (TEM) observation of brittle cracks in TiN films confirmed that these cracks are caused not cleavage fractures but by intergranular fractures.

Information related to the author
© 2001 by The Japan Society of Mechanical Engineers
Previous article Next article
feedback
Top