Consideration of Deformation of TiN Thin Films with Preferred Orientation Prepared by Ion-Beam-Assisted Deposition

Abstract

Plastic deformation of TiN thin films with (111) and (200) preferred orientation was determined based on their hardness anisotropy. Hardness was measured by means of the nano-indentation technique. Plastic deformation of TiN films was caused by the indentation of the trigonal diamond tip, and evidence of this phenomenon was provided by cross-sectional scanning electron microscopy (SEM) observation and transmission electron diffraction (TED) analysis. The influence of the differences in residual stress and grain size on hardness anisotropy was restrictive, and hardness anisotropy can be explained by the anisotropy of yield stress as calculated using Schmid’s law. This relationship suggests the existence of a {100}‹110› slip system in the TiN crystal. Transmission electron microscopy (TEM) observation of brittle cracks in TiN films confirmed that these cracks are caused not cleavage fractures but by intergranular fractures.