Influence of Heat Treatment on Mechanical Properties of DLC Deposited by FIB-CVD

Abstract

The influence of heat treatment on the mechanical properties of DLC deposited by FIB-CVD was examined. To evaluate the mechanical properties, Young’s modulus and Vickers hardness were measured by the nano indentation tester. For the characterization of DLC structure, Raman scattering was used. The microstructures of samples were characterized by HRTEM equipped with EELS. From results of the indentation experiments, it was found that Young’s modulus and Vickers hardness decreased with increasing heat treatment temperature. Analysis of Raman and EELS spectra indicated that the decrease of Young’s modulus and hardness was caused by the decrease of sp³ fraction.