JSME international journal. Ser. A, Mechanics and material engineering
Print ISSN : 1340-8046
Nanoscopic Hardness Measurement by Atomic Force Microscope
Nobuo NAGASHIMA, Saburo MATSUOKA, Kensuke MIYAHARA
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1996 Volume 39 Issue 3 Pages 456-462

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Abstract
Atomic force microscopes (AFMs) can be used for atomic-scale imaging and nanofabrication. Taking advantage of this we developed a nanoindentation technique. Hardness measurements were carried out on cementite-spheroidized S 25 C carbon steel (Vickers hardness Hv =128) and 400°C-tempered SNCM 439 low alloy steel (Hv =414), using a cantilever with a three-sided pyramidal diamond tip. The depth of indentations created was between 14 and 330 nm. The difference in hardness between S 25 C and SNCM 439 steels was detected in the nanoscopic region. From these results, it was concluded that nanoindentation was realized with AFM
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© The Japan Society of Mechanical Engineers
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