Property Evaluation of Vapor-Deposited TiN Film by the Analysis of Elastic Waves : 1st Report, Nondestructive Evaluation of Elastic Properties by Laser Surface Acoustic Waves

Abstract

The elastic properties of TiN films deposited on stainless steel SUS317J2 by three physical vapor deposition methods were estimated from the velocity dispersion of laser surface acoustic waves(SAWs) in the frequency range of 30 to 60 MHz. The velocity dispersion of Rayleigh waves was obtained by the scanning interference fringes(SIF) system and was used to estimate the elastic stiffness of the films. Depending on the deposition method, Young's moduli of TiN films were found to increase in the order of activation reaction method(ARE) → hollow cathode discharge(HCD) → arc ion discharge(AID) method. The attenuation of SAWs was the highest for AID film due to the poor quality of the film.