OS06W0405 Characterization of amorphous electrically conductive Mo-Si-N films for micromechanical applications

Abstract

Amorphous metallic alloys constitute a promising new group of materials for micromachining. Their most significant advantage over silicon is that film deposition may take place at so low temperatures that polymeric sacrificial layers tolerate the process. This paper describes characterization of molybdenum-silicon-nitrogen alloys, representing the so-called "mictamict" group, by keeping the focus on properties relevant to microelectromechanical applications. Structural, mechanical, electrical, optical, and thermal properties are reported.