The Abstracts of ATEM : International Conference on Advanced Technology in Experimental Mechanics : Asian Conference on Experimental Mechanics
Online ISSN : 2424-2837
2003
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OS6(1)-3(OS06W0370) AFM Tensile Test of Sub-Micron Thick DLC Film for Surface Modification in MEMS
Yoshitada Isono, Takahiro Namazu
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Pages 105-

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© 2003 The Japan Society of Mechanical Engineers
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Proceedings of the Asian Pacific Conference on Fracture and Strength and International Conference on Advanced Technology in Experimental Mechanics

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