Abstract
Diamond films were synthesized on a Mo substrate using combustion flame. During the cooling process, most diamond films delaminated. From previous work it has been shown that a three-step method using combustion flame was viable to prevent a delamination. But it was not perfect. In order to get a good adhesion of the diamond film, distances of the flame inner cone from the substrate were changed for each step of the three-step method. The first step of the three-step method was set to the distance d=1.5mm, the second step was set to the distance d=2.0mm and the third step was set to the distance d=3.0mm, respectively, with each scratching treatment of #180, 400, 800 and 1500 of the substrate surface. The results showed that the good adhesion of the diamond film was obtained at scratching treatments #400, 800 and 1500. An abnormal growth of the film did not occur by the changing distances. The inspection by SEM and XRD showed that synthesized films at the scratching treatment #400, 800 and 1500 by the changing distances were good diamond. It was concluded that the delamination-free diamond film could be realized by changing the distances.