Abstract
The reliable reproducibility is a key issue in the nano-imprint lithography process. In this study, we have fabricated rhombus-shaped symmetric AFM probes for mechanical characterizations of nano/micro structures using single crystal silicon micromachining techniques. Probe's overall length, width and thickness are 6mm, 100 μm, and 30 μm, respectively and the spring constant of the probe is 11.1 N/m. The silicon flat tip of the AFM probe was covered by PAK01 resist using micromanipulator and the liquid PAK01 was cured by UV wavelength at 30 mW/cm^2 for about 120 sec. APMDS, GPTS, and APTS were used as adhesion promoters for the test. Uniform SAMs(Self-Assembled Monolayers) were fabricated by vapor deposition method of silane agents. Adhesion properties between PAK01 resin and adhesion promoters, and adhesion forces between PAK01 resin and the tip coated by anti-sticking layer were measured in the Force/Distance spectroscopy mode using commercial AFM machine. The loading speed is 0.3 μm/s and unloading speed is 0.5 μm/s. The measured adhesion forces of SAMs (GPT, APMDS, APT), DUV-30J, O_2 planarization, FOTS and DDMS are about 7180 nN, 4900 nN, 2476 nN, 3200 nN, 3030 nN, 1656 nN and 1860 nN, respectively.
