2004 Volume 47 Issue 3 Pages 439-446
This paper overviews the MEMS applications to micro optics and focuses onto recent development in the field of fiber optic telecommunication such as optical crossconnects, variable optical attenuators, and general spatial light modulators using microelectromechanical scanning mirrors or lenses. We also discuss common topics in MEMS that await technical solutions such as lower driving voltage, higher mechanical tolerance and better electromechanical stability. As a next target, we present a new perspective to nanophotonic approach of MEMS where photonic crystal waveguides are integrated with micro/nano mechanical devices to realize highly integrated photonic circuits.
JSME international journal. Ser. 1, Solid mechanics, strength of materials
JSME international journal. Ser. A, Mechanics and material engineering
JSME international journal. Ser. 3, Vibration, control engineering, engineering for industry
JSME international journal. Ser. C, Dynamics, control, robotics, design and manufacturing
JSME International Journal Series A Solid Mechanics and Material Engineering