Deposition and Tribology of Carbon and Boron Nitride Super Lattice Solid Lubricant Films

Abstract

Carbon and boron nitride super lattice films were deposited by RF sputtering using two semicircular targets. Super lattice (C/BN)_n films were deposited by control of the opposing time of substrate to each graphite and boron nitride semicircular targets respectively. Micro Vickers hardness, nanoindentation hardness and nanoscratch properties of these films were evaluated. Both micro Vickers and nanoindentation hardness of 4nm period (C/BN)_n multi layered film are the highest of all period (C/BN)_n films. The multi layered film with a proper period exhibits superior hardness and nanoscratch resistance. From the evaluation of nanoscratch test, oscillatory scratch test, and ball on disk tribo test, the friction coefficient of the 4-nm-period (C/BN)_n multi layered film is lower than those of other period (C/BN)_n, carbon, boron nitride and carbon nitride films. The 4-nm-period (C/BN)_n multi layered films show the least damage and superior sliding endurance.