Optimization of Processing Condition for Deposition of DLC Using FIB-CVD Method

Abstract

The processing conditions for deposition of DLC using the FIB-CVD method were examined in detail. Microstructures and mechanical properties of the DLC specimens were also investigated. The deposition process of the DLC specimen is varied by the probe current of the ion beam. Through these examinations, optimum deposition condition was discussed. HRTEM image and diffraction pattern showed that the DLC specimen had amorphous structures. Young’s modulus and Vickers hardness were in the range of 110-140GPa and 1100-1400HV, respectively. These mechanical properties were obtained similarly even though the processing conditions were changed in our study.