1998 Volume 41 Issue 2 Pages 199-205
In this paper, the asymmetric 2-D mixed method (A2DMM) was proposed to measure 2-D surface profile and scanning errors of the scanning stages.Two phasemodulated fiber interferometric displacement sensors and two angular sensors are developed to construct a measuring probe to realize the method.Zero adjustment errors caused by misalignment of the sensor's zero outputs are also analyzed, and a self-correction method for compensating zero adjustment errors is presented.2-D surface profile of a silver-coated glass plate is measured using this measuring head.The measurement results are evaluated and compared with those obtained by other differential methods.The z-directional translation motion, roll and pitch are accurately evaluated.
JSME international journal. Ser. 1, Solid mechanics, strength of materials
JSME international journal. Ser. A, Mechanics and material engineering
JSME international journal. Ser. 3, Vibration, control engineering, engineering for industry
JSME international journal. Ser. C, Dynamics, control, robotics, design and manufacturing
JSME International Journal Series A Solid Mechanics and Material Engineering
JSME International Journal Series B Fluids and Thermal Engineering