Development of Prototype Micromechanical Optical Switch

Abstract

A new mechanical optical switch with a latching function was fabricated on a planar lightwave circuits(PLCs)by combining three technologies : integrated optics, micromachining on silicon or silica, and surface mounted actuators. The switching function is obtained by mechanical deflection of silica cantilevers driven by electro-magnetic force. A prototype switch was made and its performance was measured experimentally. The insertion loss was 4.4 dB, cross-talk was -40 dB, and switching time was 40 ms for a driving voltage of 7 V and a current of 350 mA.