The Proceedings of The Computational Mechanics Conference
Online ISSN : 2424-2799
2000.13
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Development of Film Thickness Measurement by Using Laser Diode
Kenji KUMAGAI, Kenji AMAYA, Shigeru AOKI
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Keywords: Thickness Measurements, Laser Diode, Numerical Aperture, Kalman Filter
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Pages 423-424

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© 2000 The Japan Society of Mechanical Engineers
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