The Proceedings of The Computational Mechanics Conference
Online ISSN : 2424-2799
2000.13
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The development of the ion shower etching simulator with the molecular dynamics method
Satoshi IZUMIYujiro KAIHARASyotaro HARAShinsuke SAKAI
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CONFERENCE PROCEEDINGS FREE ACCESS

Pages 613-614

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© 2000 The Japan Society of Mechanical Engineers
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